Towards a Multivariable Auto-tuner
نویسندگان
چکیده
An MIMO auto-tuning method is develop that can be used by a layman of control. The method is based on MIMO identification and robust control design. The identification part delivers process model and model error bounds. The controller design block performs control synthesis, simulation and robust analysis. All steps can be done automatically. The parameters the user needs to enter are minimal and easy to understand and to obtain. The developed scheme is applied to a high-precision wafer stage motion control using simulations. The step tracking performance is optimized using the method and it is compared with a multi-loop PID controller. Copyright © 2005 IFAC
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